Search for "micro-electromechanical systems (MEMS)" in Full Text gives 6 result(s) in Beilstein Journal of Nanotechnology.
Beilstein J. Nanotechnol. 2020, 11, 1525–1541, doi:10.3762/bjnano.11.135
Beilstein J. Nanotechnol. 2020, 11, 1242–1253, doi:10.3762/bjnano.11.108
Beilstein J. Nanotechnol. 2018, 9, 2128–2170, doi:10.3762/bjnano.9.202
Beilstein J. Nanotechnol. 2018, 9, 1995–2014, doi:10.3762/bjnano.9.190
Beilstein J. Nanotechnol. 2014, 5, 1268–1284, doi:10.3762/bjnano.5.141
Beilstein J. Nanotechnol. 2010, 1, 163–171, doi:10.3762/bjnano.1.20